First-principles and semi-empirical potential calculations of He-vacancy complexes in silicon

Laurent Pizzagalli

CNRS, Institute P’, Physics and Mechanics of Materials, Futuroscope Chasseneuil, France

In order to better understand the initial steps leading to the formation of He-filled cavities in covalent materials, we have performed DFT calculations of systems including several He atoms in interaction with mono and divacancies in silicon. In the case of a single He atom, the mobility of the formed complexes has been investigated, suggesting that an He atom always migrates as an interstitial. For several He atoms, we found that a large number of He atoms can be accommodated in vacancies. The permeation mechanism of a single He atom through a silicon surface has also been investigated, indicating that the surface of a bubble in silicon is porous. Using these results and a simple model for describing He in a highly pressurized fluid state, we were able to determine a range for pressure inside a He-filled bubbles. Finally, a semi-empirical potential has been developed from first-principles results, and preliminary results of finite temperature simulations will be presented.

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