Coherent Diffraction Imaging with a Hard X-ray Nanobeam

Christian Schroer

Technische Universität Dresden, Dresden, Germany

Coherent x-ray diffraction imaging is an x-ray microscopy technique with the potential of reaching spatial resolutions well beyond the diffraction limits of x-ray microscopes based on optics. However, the available coherent dose at modern x-ray sources is limited, practically limiting the spatial resolution of the technique. By focusing the available coherent flux onto the sample, the spatial resolution can be improved for radiation-hard specimens. A small gold particle (size < 100 nm) was illuminated with a hard x-ray nanobeam (E = 15.25 keV, beam dimensions ~ 100 x 100 nm2) and is reconstructed from its coherent diffraction pattern. A resolution of about 5 nm is achieved in 600 s exposure time.

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